Science, Engineering, Sleuths, Edition, Second, Cool, images, Technology, Microlithography, Opitcal

Microlithography: Science and Technology, Second Edition (Opitcal Science and Engineering)

This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts.

New in the Second Edition
In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including…

Immersion Lithography

157nm Lithography

Electron Projection Lithography (EPL)

Extreme Ultraviolet (EUV) Lithography

Imprint Lithography

Photoresists for 193nm and Immersion Lithography

Scatterometry

Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition.

Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.

List Price: $ 157.95



Price: $ 110.00

Other posts like this, by keyword:

Science:

Mystery Books blog ...
Animals Books blog ...
Chick Lit Books ...
Knitting Books blog ...
Romance Books blog ...
Finance Books blog ...
Libros en Espanol Books ...
Audiobooks Books blog ...
Food Lit Books ...
Crafts Books blog ...
Engineering:

Diet Books blog ...
Golf Books blog ...
Women Sleuths Books ...
Art and Architecture Books blog ...
Mothers and Children Books ...
Baseball Books blog ...
Movies Books ...
Entertainment Books ...
Atlases Books ...
Ghosts Books ...
Sleuths:

Management Books ...
Maryland Politics: GOP gains 6 delegates, may lose 2 Senate seats ...
British Women Mystery Writers: Six Authors of Detective Fiction with Female Sleuths ...
Nancy Drew and Her Sister Sleuths: Essays on the Fiction of Girl Detectives ...
Edition:

Mystery Books blog ...
Mystery Books blog ...
Business and Finance Books ...
History Books blog ...
Social Issues Books ...
Golf Books blog ...
Mathematics Books blog ...
Needlepoint Books blog ...
Science Fiction and Fantasy Books ...
Web Development Books ...
Second:

Military Books blog ...
Art and Architecture Books blog ...
Alternate History Books ...
New Age Books blog ...
Web Development Books ...
Erotica Books ...
Programming Books blog ...
Christianity Books ...
New Age Books blog ...
Museums Books blog ...
Cool:

Non Fiction Books blog ...
How to Books blog ...
Home and Garden Books ...
Water Sports Books ...
World Books blog ...
Cooking Books blog ...
Medical Books blog ...
Atlases Books ...
Fitness Books ...
Ghosts Books ...
images:

Non Fiction Books blog ...
How to Books blog ...
Home and Garden Books ...
Water Sports Books ...
World Books blog ...
Cooking Books blog ...
Medical Books blog ...
Atlases Books ...
Atlases Books ...
Fitness Books ...
Technology:

History Books blog ...
Finance Books blog ...
Pets Books blog ...
Entertainment Books ...
Audiobooks Books blog ...
Books Under 5 Books ...
Television Books blog ...
Science Fiction and Fantasy Books ...
Atlases Books ...
Libros en Espanol Books ...
Microlithography:

Opitcal: